Microfluidics Manufacturing: What is the DRIE Process (Deep reactive ion etching)?

Posted By Borja Barredo / Technology Blog / MEMS, microfluidic chip, microfluidics / No hay comentarios

Microfluidics Manufacturing: DRIE Process (Deep reactive ion etching)

The DRIE – Deep reactive ion etching: In this attack , a highly anisotropic(focus on one direction) etching, we can define the desired structures on silicon with the heights defined before. It is a  used to create also through holes and estructures in wafers / substrates,  with typically high aspect ratio.

The definition obtained with this attack over the Silicon is very good. We use the Bosch process to do it.

First we passivate with metals the wafer parts you want to keep  and then do the attach with the ion plasma which removes the silicon from the non passivated parts.

To do the DRIE process , we use a special machine you can see in the photo below.

DRIE PROCESS - Deep reactive-ion etching

DRIE PROCESS – Deep reactive-ion etching


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Microfluidics Manufacturing: What is Anodic Bonding?

Posted By Borja Barredo / Technology Blog / MEMS, microfluidic chip, microfluidics / No hay comentarios


Anodic bonding between glass and silicon through electric fields

Anodic bonding between glass and silicon through electric fields

Microfluidics Manufacturing: Anodic Bonding

The Bonder enables Anodic Bonding  (Sealing)  between a Silicon wafer and  a Crystal Wafer. This seal is used primarily for connecting silicon / glass and metal / glass through electric fields.

The requirements for anodic bonding are cleaned surfaces availability  on both  wafers  and the atomic contact between the binding substrates through an electrostatic field  should be strong enough

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Microfluidics with microLIQUID in the BIOBASQUE 2016 Catalog

Posted By Borja Barredo / News / MEMS, microfluidic chip, microfluidics / No hay comentarios

Microfluidics in the Catalogue

Biobasque Cluster Logo

Biobasque Cluster Logo

MicroLIQUID integrated in the new BIOBASQUE Catalog, where all the information of the biotech companies of the Basque Region is available.

Here you can get the full information about the companies:


The BASQUE BIOCLUSTER is a non-profit association constituted in 2010, and represents the idea of enhancing the biosciences sector in the Basque Country. The coordination, the collaboration with all the stakeholders in the sphere of biosciences, promoting business cooperation is the basis for the competitive development of its companies and their internationalisation, and is greatly contributing to the development and positioning of the Basque bio sector.


Today the Basque Biocluster has 30 partner businesses, 58 including their subsidiaries, which in 2014 had a turnover of €268 million, 78.7% (€211 million) of which came from the export of their products and services to international markets. As a whole, the companies in the association contribute to the maintenance of 1,632 jobs.

Industry based on biosciences is characterised by the close relationship between research, innovation and competitiveness, and largely rests on the appearance of a new type of companies whose objective is to exploit advanced technologies related to the sciences of life, in order to respond to myriad needs in various industrial spheres.

In today’s catalog, more than 80 entities are dedicated to biotechnology research, of which 51 had biotechnology as their main or exclusive activity, assigning more than half of their internal expenses to biotechnology R&D. Of these 80 entities, 70 are biotechnology companies.

The bio sector employs 1,183 people full time, or in other words, 6.4% of total R&D personnel in the Basque Country, with the outstanding presence of women, who represent more than 60% of all people working full time in biotechnology.

Research personnel, for their part, stand at 903 people, 76% of the total.

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